在氣體面板、氣體柜和任何需要超純氣體進(jìn)行晶片加工的地方提供卓越的顆粒過濾。緊湊的裝置減少了整個(gè)氣箱的占地面積，節(jié)省了寶貴的設(shè)備空間聚四氟乙烯膜提供了高效率的過濾，提高了產(chǎn)品產(chǎn)量低壓降降低了低蒸汽壓氣體中的冷凝風(fēng)險(xiǎn)與所有種類的半導(dǎo)體工藝氣體具有極好的兼容性，可與惰性和活性氣體一起使用，包括臭氧
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| PART NUMBER |
FITTING SIZE AND TYPE |
LENGTH |
| WG2F02JJ2 |
1/4" Butt weld tube |
133.4 mm (5.25") |
| WG2F02JJ4 |
1/2" Butt weld tube |
133.4 mm (5.25") |
| WG2F02PS1 |
1/4" compression seal (compatible with Swagelok fitting) male inlet/outlet |
115.5 mm (4.55") |
| WG2F02RR2 |
1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet |
127.0 mm (5.00") |
| WG2F02RR4 |
1/2" Gasket seal (compatible with VCR fitting) male inlet/outlet |
133.4 mm (5.25") |
| WG2F32PS1 |
3/8" Compression seal (compatible with Swagelok fitting) male inlet/outlet |
119.3 mm (4.70") |