A reliable and cost-effective solution for CMP slurry and high-purity chemical distribution systems. An innovative diaphragm design maximizes stroke, enabling a very high flow rate with a small footprint.
- Unique internal radius enables a fully swept, increased flow path, decreased pressure drop and reduced shear
- All wetted parts are PFA and PTFE, external parts are PVDF, providing higher chemical resistance and reliability
- No external metal parts and no metals in secondary containment chamber means lower contamination potential in the event of a media leak or exposure to harsh external environments
- External, nonwetted components are available in ECTFE material for higher chemical resistance to oxygenated solvents and bases
CMP漿料和高純度化學(xué)品分配系統(tǒng)的可靠且經(jīng)濟(jì)的解決方案。創(chuàng)新的隔膜設(shè)計(jì)使沖程最大化，以較小的占地面積實(shí)現(xiàn)非常高的流量。獨(dú)特的內(nèi)半徑可實(shí)現(xiàn)完全吹掃、增加流路、降低壓降和減少剪切。所有潤(rùn)濕部件為PFA和PTFE，外部部件為PVDF，提供更高的耐化學(xué)性和可靠性。無(wú)外部金屬部件和二級(jí)密封室中無(wú)金屬意味著在介質(zhì)泄漏或暴露于惡劣外部環(huán)境的情況下污染可能性更低。外部非潤(rùn)濕部件可用于ECTFE材料，對(duì)氧化溶劑和堿具有更高的耐化學(xué)性
Port ConnectionFlow Factor CVFlow Factor KVABCD3/4" Flaretek16.795.75.27" (133.9 mm)0.80" (20.3 mm)3.87" (98.3 mm)4.17" (105.9 mm)3/4" Super 300 Type Pillar fitting6.795.75.25" (133.4 mm)0.80" (20.3 mm)3.87" (98.3 mm)4.17" (105.9 mm)3/4" PrimeLock6.795.75.92" (150.4 mm)0.96" (24.4 mm)4.23" (107.4 mm)4.53" (115.1 mm)3/4" PureBond8.2117.14.67" (118.6 mm)0.80" (20.3 mm)3.87" (98.3 mm)4.17" (105.9 mm)1" Flaretek19.8140.05.74" (145.8 mm)0.96" (24.4 mm)4.23" (107.4 mm)4.53" (115.1 mm)1" Super 300 Type Pillar fitting9.8140.05.75" (146.1 mm)1.04" (26.4 mm)4.31" (109.5 mm)4.61" (117.1 mm)1" PrimeLock9.8140.06.26" (159.0 mm)1.12" (28.4 mm)4.39" (111.5 mm)4.69" (119.2 mm)1" PureBond10.9155.74.67" (118.6 mm)0.96" (24.4 mm)4.23" (107.4 mm)4.53" (115.1 mm)
