?
or
1830-0055
Chlorine
Cl2
0-2 ppm 0.24 ppm 0.25 ppm
0-2 ppm 0.24 ppm 0.25 ppm
0.50
0.50
ppm MIDAS-S/E-HAL
ppm MIDAS-E-HAX
10 12 1 500 Cl
10 43 1 500 Cl
2
2
1 1 300 Cl
1 1 300 Cl
2
2
1 180 10
1 180 10
1991-0147
or
1830-0055
Chlorine Dioxide ClO2
0-0.4 ppm 0.048 ppm 0.05 ppm 0.1 ppm MIDAS-S/E-BR2 20 13 2 500 Cl2
0.2 0.27 300 Cl2
0.2 180 10
1991-0147
or
1830-0055
Diborane
B2 H6
0-400 ppb 48 ppb 50 ppb 100 ppb MIDAS-S/E-B2H 20 3
33 1 500 B2H6 0.2 0.2 300 PH3
0.3 180 30
780248 2,
1991-0147
or
1830-0055
Dichlorosilane SiH2 Cl2
0-8 ppm 0.95 ppm 1 ppm 2 ppm MIDAS-S/E-HCL 20 3
10 3 500 HCl 4 4 300 HCl 4-6 180 5 4
1991-0147
or
1830-0055
Dichlorosilane
High Range
H2 SiCl2
0-15 ppm 5 ppm 5 ppm 10 ppm MIDAS-E-HCH 20 30 2 500 HCl 10 10 300 HCl 10 180 5
1991-0147
or
1830-
0055"
Diflfluoromethane CH2 F2
0-120 ppm 8 ppm 15 ppm 30 ppm MIDAS-S/E-XCF 20 3
35 3 500 HF 2
5 40 300 Cl2 2
5 180 30
780248 2 ,
1991-0147
or
1830-0055
Disilane
Si2 H6
0-20 ppm 2.4 ppm 2.5 ppm 5 ppm MIDAS-S/E-SHX 20 05 2 500 SiH4
10 11.3 300 H2 S 50 180 10
Ethylene
C2H4
0-100% LEL 4.5% LEL 10% LEL 20% LEL MIDAS-S/E-LEL 30 25 5 500
C2H4
1.35 vol% 50 %LEL 300 C2H4
180 30
H2
2 vol%
1.35 vol%
2 vol%
60 %LEL 300 H2
180 30
780248,
780248,
1991-0147 or
1830-0055
1991-0147
or 1830-0055
Fluorine
F2
0-4 ppm 0.48 ppm 0.50 ppm 1 ppm MIDAS-S/E-HAL 10 12 2 500 Cl2
2 2 300 Cl2
2 180 10
1991-0147
or
1830-0055
Germane
GeH4
0-800 ppb 95 ppb 100 ppb 200 ppb MIDAS-S/E-ASH 20 02 2 500 AsH3
0.1 0.54 300 PH3
0.1 180 30
780248,
1991-0147
or
1830-0055
Hexaflfluorobutadiene C4 F6
0-40 ppm 4.0 ppm 5 ppm 10 ppm MIDAS-S/E-XCF 20 3
35 1 500 HF 2
5 10.38 300 Cl2 2
5 180 30
780248 2 ,
1991-0147
or
1830-0055