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電子/電力

韓國ATOVAC壓力計流量計MPG1000 MPG2000
  • 韓國ATOVAC壓力計流量計MPG1000 MPG2000

  • 韓國ATOVAC公司成立于1997年10月,開始開發(fā)半導體生產(chǎn)過程中的氣體和真空控制系統(tǒng)、測量等主要部件。我們一直專注于氣體和真空控制,這是半導體生產(chǎn)過程的核心。一家開發(fā)傳感器和測量設(shè)備的公司。我公司開發(fā)了對流式儀表及控制器、Lon儀表及控制器、電容式壓力計、節(jié)流閥控制器等真空設(shè)備的主要部件和傳感器。對ATOVAC這個不斷產(chǎn)生新想法并始終創(chuàng)造充滿活力的企業(yè)文化的公司有著持續(xù)的興趣和喜愛。ATOVAC正在加速開發(fā)MFC、MFC控制器、對流計和控制器、離子計和控制器,電容壓力計、節(jié)流閥控制器等智能組件。ATOVAC將在未來和現(xiàn)在保持我們作為可靠和受人尊敬的公司的地位。

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Throttle valve

[APC200] APC200 [Throttle Valve Controller]

APC200 Throttle ValveController

APC200 Pressure & Flow Controller is a Digital PID Pressure Controller for throttle?

Valve, It can supply +/- 15VDC to power and provide a readout for an attached?

Capacitance Manometer & four mass flow controllers.

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Features & Benefit

■?Maximum 4 channel MFC control out(2,4 channel available)

■?RS-232C PC Interface , TTL flow On/Off Command available

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GMC1200 [Flow & Pressure Controller]

GMC1200 Flow & Pressure Controller

Model GMC 1200 Flow & Pressure Controller can supply +/- 15 VDC to power and provide readout for attached MFC (Mass Flow Controller)’s.

It’s designed to control and display any flow meter or controller.

The flow rate set point (0 – 5 VDC) can be adjusted either through front panel controls or remotely through the rear panel RS232C PC interface.

GMC 1200 Flow & Pressure Controller provide readout pressure signal for attached Capacitance Manometers instead of Mass Flow Controllers.

It must be installed capacitance manometer display board instead of flow control board.

Pressure signal to display is 0 – 10 VDC only

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Features & Benefits

■?Microprocessor based Controller

■?16 bit Bipolar A/D Converter used

■?Displaying by? graphic LCD(128*64 dot)

■?User selectable Flow and Pressure units

■?User friendly numeric button data input such as set-point value etc,,,

■?Maximum 8 channel MFC control out(2,4,6,8 channel available)

■?Gas mixing ratio function

■?Accumulation function

■?Automatic upstream pressure control function

■?RS-232C PC Interface , TTL flow On/Off Command available

■?CE Mark compliant

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GMC220 [Power Supply & Readout Unit]

GMC220 Power Supply & Read out Unit

Model GMC 220A supplies power to MFC, displays actual gas flow value through MFC by taking analog signal, introduces any set point value that user wants to control in the front panel and is designed to confirm with actual flow value by using simple button switch.

And also, it can be inputted the full scale range for connected MFC and used to set gas correction factor in case of using the other gas to connected MFC.

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Features & Benefits

■?Compact size as 2 channel, saving space

■?12 bit Bipolar A/D Converter used

■?Displaying by 7-segment LED

■?Analog Volume data input such as set-point value etc...

■?Gas mixing ratio function

■?TTL flow On/Off Command available

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LOGO

?153 3523 8557?153 3523 8557

無錫市錫山區(qū)錫北鎮(zhèn)東房橋文八路142號無錫市錫山區(qū)錫北鎮(zhèn)東房橋文八路142號

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